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Use of P-V metric is specified for Nanotopography quantification
• Authentication of consistency of recipes in equipment with Recipe Server by providing an optional Pre-Execution Check mechanism
The scope of this Standard lists the proposed impurity limits of trans 1
The alphanumeric marking of this Specification is valid for a broad range of wafer products (e
M07500 - SEMI M75 - Specification for Polished Monocrystalline Gallium Antimonide Wafers StdPbc-1020 Use of P-V metric isThe purpose of this Document is to define standard descriptions for the parameters to be specified in the procurement and supply of round wafers of gallium antimonide (GaSb) monocrystalline material. This Specification covers the information required for the procurement of round, flatted GaSb wafers and the standard dimensional and orientation conventions for the supply of such wafers. Referenced SEMI StandardsSEMI MF26 Test Method for Determining the
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